



General information
Universitat Politècnica de Catalunya
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Research GroupMNT - Micro and Nano Technologies (MNT) Research Group
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Hosting Organisiation
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AddressC/Jordi Girona, 1-3, C4 Building (08034, Barcelona)
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Contact Info:
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Phone
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Emailsct.rdi@upc.edu
Description
The Micro and Nano Technologies (MNT) research group focuses on the development and manufacturing of advanced semiconductor devices. With a long-standing trajectory and a team of 18 PhD members, the group's activity centers on photovoltaic solar cells and the development of cost-effective manufacturing technologies. Key research areas include laser technology for silicon solar cells, HIT (Heterojunction with thin Intrinsic layer) and IBC (Interdigitated Back Contact) fabrication, passivation layers, organic cells, and thermophotovoltaics. Additionally, the group specializes in 3D photonic crystals, micro-scale liquid manipulation, charge control in MEMS and MOS devices, and the development of anemometric and chemical sensors.
Summary of Research Services
The group offers over twenty-five years of expertise in the fabrication of electronic devices, particularly solar cells and sensors, to both research and industrial environments. Services include:
• Training of personnel in micro- and nano-electronic manufacturing technologies.
• Research alliances and technology transfer efforts focused on improving device performance and manufacturing efficiency.
• Access to a wide technological base through agreements with other service providers and research institutions
Technology Capabilities
The group provides advanced manufacturing and characterization capabilities for micro- and nano-scale devices. This includes expertise in silicon processing, material deposition, and both photographic and laser lithography. They excel in surface and volume micro-processing, as well as the development of advanced semiconductor architectures for energy and sensing applications.
Main equipment or Facilities
• Clean Room: A core facility integrated within the Department of Electronic Engineering, uniquely positioned within an academic environment in Spain.
• Lithography Equipment: Photolithography (1-micrometre resolution) and laser lithography tools.
• Deposition Systems: Atomic Layer Deposition (ALD), Sputtering, Thermal Evaporation, Electron Beam, and Plasma-Enhanced Chemical Vapor Deposition (PECVD).
• Processing Tools: Chemical benches, furnaces, and equipment for surface and volume micro-processing.